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2017-11-05 09:55
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Company Profile
Guangzhou Minder-Hightech Co., Ltd.By certification [File Integrity]
Contact:Mr. Minder Hu(Mr.)
Email:
Telephone:
Phone:
Area:Guangdong
Address:Guangdong
Website: http://minder-hightech.artstx.com/
MD-BG-401A Mask Aligner is used in aligning and exposure process of small or middle scale IC, SAW, and other semiconductor device.
Main Features:
Alignment:Alignment provides high precision and less excursion. Three-point paralleling with less force is achieved by wedge error compensation, and the use life of mask is prolonged.
Exposure system:Pole fly's lens and ellipsoidal reflector with high light gathering power
Split view field microscope :Large scan and observing range in X and Y direction, shift between single field and double field, higher alignment efficiency and overprint precision, compatibility of image display function with CCD
Operation is convenient by PLC and LCD display adopted in electric control system, and high reliability and stability could be obtained. Stability and reliability of the equipment are improved by use of key parts from import or professional manufacturer, pneumatic elements from SMC, and personal service is provided for different user.
Main Specifications:
Alignment travel:
X- axis:±5mm Y- axis:±5mm
Z- axis:3mm θ:±12°
Size of mask: Max5″×5″
Size of wafer: Maxφ4″
Gap between wafer and mask:0-0.05mm
Exposuring Resolution:1.0um (Vacuum contact)
Exposure system and wavelength:
250w High pressure mercury lamp, UV365
Exposure mode: Vacuum contact, hard contact
Exposure time:0-999.9s continuous setting
Max Exposure area: φ108mm
Non-uniformity of Exposure: ±3%
Split view field microscope
Total magnification: 100×(50×optional)
Range of scan: 50mm×50mm
Range of focus: 8mm
Separation between objectives: 28-90mm
Facilities:
Voltage:~220V±22 V(50Hz)
Power consumption:1KW
Light: Red or yellow
Air pressure: 0.5~0.7MPa
N2 pressure: 0.2~0.4MPa
Vacuum: -0.08~-0.1MPa
Dimensions & Weight:
Overall Dimensions: 830mm×690mm×1270mm
Weight:300kg
Comprason table:
Model: |
Mask Size |
Wafer Size |
Exposure Type |
Manual /Automatic |
Application has been in |
MD-BG-401A |
5inch |
4inch |
Single side |
manual |
Small or middle IC,SAW,other |
MD-SB-402 |
5inch |
4inch |
Dual side |
manual |
Photoelectric/power device,sensors,hybrid circuits,MEMS etc. |
MD-BG-403D |
5inch |
4inch |
Dual side |
manual |
GPP diode,power device,others. |
MD-BG-403S |
5inch |
4inch |
Single side |
manual |
|
MD-BG-406 |
7inch |
6inch |
Single/double |
manual |
IC.GPP,LED,MEMS,others |
MD-BG-407 |
5inch |
2/3/4 inch |
Single side |
automatic |
LED,Diode,triode,etc. |
MD-BG-601A |
7inch |
6inch |
Single/double |
manual |
Power,sensor,photoelectron devise,etc. |
MD-BG-602B/C BX |
7inch |
6inch |
Single/double |
manual |
|
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Guangzhou minder-hightech co., ltd www.minder-hightech.com
No.1 Xingya 3 Road, panyu district, guangzhou, China
Shunyu Hu 0086-15813334038
Cell phone:0086-15813334038